JPH0331432Y2 - - Google Patents
Info
- Publication number
- JPH0331432Y2 JPH0331432Y2 JP12310386U JP12310386U JPH0331432Y2 JP H0331432 Y2 JPH0331432 Y2 JP H0331432Y2 JP 12310386 U JP12310386 U JP 12310386U JP 12310386 U JP12310386 U JP 12310386U JP H0331432 Y2 JPH0331432 Y2 JP H0331432Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- carrier
- carriers
- cleaning
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 28
- 238000004140 cleaning Methods 0.000 claims description 24
- 238000001035 drying Methods 0.000 claims description 15
- 239000000969 carrier Substances 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 3
- 238000009987 spinning Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000007664 blowing Methods 0.000 description 1
- 239000012050 conventional carrier Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12310386U JPH0331432Y2 (en]) | 1986-08-11 | 1986-08-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12310386U JPH0331432Y2 (en]) | 1986-08-11 | 1986-08-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6332689U JPS6332689U (en]) | 1988-03-02 |
| JPH0331432Y2 true JPH0331432Y2 (en]) | 1991-07-03 |
Family
ID=31013898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12310386U Expired JPH0331432Y2 (en]) | 1986-08-11 | 1986-08-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0331432Y2 (en]) |
-
1986
- 1986-08-11 JP JP12310386U patent/JPH0331432Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6332689U (en]) | 1988-03-02 |
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